Surface Topography Laboratory
The surface profilometer from Bruker is used for determining a thickness of the deposited thin films and also for determining layer uniformity. It can be used for measuring the surface topography along with roughness of solid surfaces. This robust system with low noise electronics can measure sample thicknesses using a step with height in the range of a few nanometers to maximum 1 mm with a vertical resolution of about 0.1 nm. A maximum size of the wafer can be 200 mm, while the maximum scan length 55 mm.
Surface profilometer: Bruker DektakXT
Ground Floor, Room : R003B